Title:
A study of mathematical models used for
spectroscopic ellipsometry data analysis
/ by Kawthar Mohammed al-Adamat ; supervised by Prof. Dr. Husam El-Nasser. دراسة النماذج الرياضية لغايات تحليل بيانات مطيافية القطع الناقص
دراسة النماذج الرياضية لغايات تحليل بيانات مطيافية القطع الناقص دراسة النماذج الرياضية لغايات تحليل بيانات مطيافية القطع الناقص
Author:
Al-Adamat, Kawthar Mohammed,
El-Nasser, Husam, supervisor.
Al al-Bayt University (AlMafraq, Jordan). Faculty of Science. Department of Physics.
General Notes:
Thesis (M. Sc. in Physics)--Al al-Bayt University (AlMafraq, Jordan), Faculty of Science, Department of Physics
, 2019.
Includes bibliographical references and index.
Detailed calculations to determine optical parameters and thin lms morphology are presented
using spectroscopic ellipsometry. It is found by tting the ellipsometric data that it is
possible to resolve lm thickness and optical constants (refractive index and extinction coe-
cient). In this work, four di erent models have been used and the ideas for selecting the best
model are discussed. The relatively thick silicon carbide (SiC) thin lm is studied using the
Cauchy model and characterized using simple graded layer, it is obtained that SiC thin lm
has a thickness of 764 nm covered by 3.36 nm roughness layer, additionally a plot of n() from
the top and bottom is provided. We show in this work how ellipsometry provides accurate information
about anisotropic properties of organic thin lm-cobalt phthalocyanine. The values
of oscillators responsible on absorption lines in spectroscopic ellipsometry spectra are obtained
and the values of n() and k() as a function of wave length are presented. Three additional
samples were analyzed using Cauchy, Lorentz, Drude and Gaussian models. The structure of
these thin lms, the refractive index and the extinction coecient have been estimated.
The electronic version is available in theses database \\ University of Jordan.
Includes abstracts in Arabic and English.
Subject:
Physics
Spectrum analysis
Silicon carbide
Spectroscopic imaging.
Dissertation Note:
Thesis (M. Sc. in Physics)--Al al-Bayt University (AlMafraq, Jordan), Faculty of Science, Department of Physics
, 2019.
Physical Description:
CD-ROM1 : PDF.
Publication Date:
2019.
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