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Title: The physics of submicron lithography / Kamil A. Valiev.
Microdevices
Main Entry: Valiev, Kamil<U+00A7> Akhmetovich.
Publisher: Plenum Press,
Publication Date: c1992.
Publication Place: New York :
ISBN: 0306435780
Subject: Lithography, Electron beam.
X-ray lithography.
Ion beam lithography.
Physics.
Series: Microdevices
Cover Image: http://images.amazon.com/images/P/0306435780.jpg

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